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Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
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R. Röhrich, G. Oliveri, S. Kovaios, V.T. Tenner, A.J. den Boef, J.T.B. Overvelde and A.F. Koenderink,
Uncertainty estimation and design optimization of 2D diffraction-based overlay metrology targets
, ACS Photonics
7
, (10), 2765-2777 (2020)
Z. Bouza, J. Scheers, A.N. Ryabtsev, R. Schupp, L. Behnke, C. Shah, J. Sheil, M. Bayraktar, J.R. Crespo López-Urrutia, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
EUV spectroscopy of Sn5-Sn10+ions in an electron beam ion trap and laser-produced plasmas
, J. Phys. B: At. Mol. Opt. Phys.
53
, (19), 195001: 1-11 (2020)
V. Verrina, S. Edward, H. Zhang, S. Witte and P.C.M. Planken,
Photoacoustic detection of low duty cycle gratings through optically opaque layers
, Appl. Phys. Lett.
117
, (5), 051104: 1-6 (2020)
S. Patra, M. Germann, J.-Ph. Karr, M. Haidar, L. Hilico, V.I. Korobov, F. M. J. Cozijn, K.S.E. Eikema, W.M.G. Ubachs and J.C.J. Koelemeij,
Proton-electron mass ratio from laser spectroscopy of HD+ at the part-per-trillion level
, Science
369
, (6508), 1238-1241 (2020)
S. Edward, H. Zhang, S. Witte and P.C.M. Planken,
Laser-induced ultrasonics for detection of low-amplitude grating through metal layers with finite roughness
, Opt. Express
28
, (16), 23374-23387 (2020)
J. Scheers, R. Schupp, R.A. Meijer, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma
, Phys. Rev. E
102
, (1), 013204: 1-9 (2020)
S. Edward, H. Zhang, I. Setija, V. Verrina, A. Antoncecchi, S. Witte and P.C.M. Planken,
Detection of hidden gratings through multilayer nanostructures using light and sound
, Phys. Rev. Appl.
14
, (1), 014015-1-16 (2020)
F. Holtrop, A.R. Jupp, N.P. van Leest, M. Paradiz Dominguez, R.M. Williams, A.M. Brouwer, B. de Bruin, A.W. Ehlers and J.C. Slootweg,
Photoinduced and Thermal Single‐Electron Transfer to Generate Radicals from Frustrated Lewis Pairs
, Chem. Eur. J.
26
, (41), 9005-9011 (2020)
O.C.M. Lugier, A. Troglia, N. Sadegh, L. van Kessel, R. Bliem, N. Mahne, S. Nannarone and S. Castellanos Ortega,
Extreme Ultraviolet Photoelectron Spectroscopy on Fluorinated Monolayers: towards Nanolithography on Monolayers
, J. Photopolym. Sci. Technol.
33
, (2), 229-234 (2020)
N. Sadegh, M.L.S. van der Geest, J. Haitjema, F. Campi, S. Castellanos Ortega, P.M. Kraus and A.M. Brouwer,
XUV Induced Bleaching of a Tin Oxo Cage Photoresist Studied by High Harmonic Absorption Spectroscopy
, J. Photopolymer. Sci.Tec.
33
, (2), 145-151 (2020)
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Mission
Research
Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
Career
Career
All vacancies
Postdoc vacancies
PhD vacancies
Scientific internships
Support vacancies
Career
How to apply
Coming from abroad
Candidate portal
More
More
People
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Events
Repository
Contact & Directions
ARCNL Newsletter