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Advanced Research Center for Nanolithography

Science with a mission

ERC Starting Grants for ARCNL group leaders Roland Bliem and Bart Weber
- September 5, 2023
ARCNL group leaders Roland Bliem and Bart Weber each receive an ERC Starting Grant from the European Research Council (ERC). The projects granted are: –…
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Highlighted ARCNL papers
- August 23, 2023
Two recent papers of the EUV Plasma Processes group of Oscar Versolato were selected as an Editor’s pick. Alumnus Bo Liu is the first author…
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Veni for John Sheil
- August 3, 2023
ARCNL group leader and VU Assistant Professor John Sheil receives a Veni grant from NWO for his project “ARIES”. Sheil will develop a unique laser-plasma…
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Amplifying sound-wave induced reflection and diffraction signals
- July 21, 2023
ARCNL researchers Thomas van den Hooven and Paul Planken have found a way to enhance acoustic-wave-induced diffraction changes from a sample similar to those used…
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Read more news articles

- October 2, 2023
- at VU University Amsterdam
- PhD Ceremony
- Lars Behnke
Efficient EUV Light Plasma Sources Driven by a 2-µm-Wavelength Laser

Promotors: Dr O. Versolato, Prof. W. Ubachs…
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- October 6, 2023
- at VU University Amsterdam
- PhD Ceremony
- Zoi Bouza
Developments for Broadband Spectral and Spatial Characterization of Tin Plasma Light Sources for EUV Lithography

Promotors: Dr. O. Versolato, Prof. W. Ubachs, Prof. R. Hoekstra, Dr. M. Bayraktar…
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- October 6, 2023
- at University of Amsterdam
- PhD Ceremony
- Feng-Chun Hsia
Nanoscale Topography and Wear of Ceramic Interfaces and their effect on Macroscale Friction

Promotors: Prof. J. Frenken, Prof. D. Bonn…
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- October 6, 2023
- at VU University Amsterdam
- PhD Ceremony
- Lucas Poirier
Ion Diagnostics for Extreme Ultraviolet Nanolithography

Promotors: Dr. O. Versolato, Prof. R. Hoekstra, Dr. J. Sheil…
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More events

Interview

One year into partnership University of Groningen

How is it going and what to expect?

The University of Groningen joined the ARCNL public-private partnership as associate partner on January 1st, 2022. ARCNL group leader Ronnie Hoekstra and governing board member Caspar van der Wal reflect on the route towards this newly established partnership and on the challenges and advantages it offers.