Advanced Research Center for Nanolithography

Due to the Covid-19 outbreak ARCNL has, until further notice, closed its offices and labs for visitors. ARCNL can be reached by phone: +31 20 8517290 and e-mail:

Packages can be delivered at neighbor institute AMOLF, located at Science Park 102.


Latest news

  • Open dag 2020, de online editie, op video

    De jaarlijkse open dag op zaterdag 3 oktober was dit jaar een online editie op ZOOM. Wim Symens (ASML) en Joost Frenken (ARCNL) gaven een…

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  • New atomic force microscopy system

    Atomic Force Microscopy (AFM) system at ARCNL The Contact Dynamics group has installed a new commercial Atomic Force Microscopy (AFM) system for the characterization of…

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  • Pulsed Laser Deposition for Materials and Surface Science

    Group leader Roland Bliem working with the PLD setup In the lab for Materials and Surface Science for EUV Lithography the long awaited setup…

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  • ARCNL Working Conditions Survey 2020

    In a well-attended Zoom-session for all employees of ARCNL, Pim Stalenhoef from the company MonitorGroep presented the results of the Working Conditions Survey that his…

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Upcoming events

    • November 4, 2020
    • at ARCNL
    • Virtual Colloquium
    • Title to be announced

    Marcelo Ackermann (ASML, Eindhoven)

    A closed session…

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    • November 10, 2020
    • at VU University Amsterdam
    • PhD Ceremony
    • Joris Scheers (ARCNL)

    Charge-state-resolved spectroscopy of multiply-charged tin ions

    Promotors: Dr. Oscar Versolato, Prof. Ronnie Hoekstra, Prof. Wim Ubachs…

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    • November 18, 2020
    • at University of Amsterdam
    • PhD Ceremony
    • Lianjia Wu

    Metal oxo clusters: molecular design for extreme ultraviolet lithography

    Promotor: Prof. Fred Brouwer…

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What do we need for tomorrow’s smartphone?

Watch this video to find out more about extreme ultraviolet (EUV) light and the public private partnership ARCNL. The camera crew filmed Oscar Versolato (EUV Plasma Processes) and his group members while carrying out experiments.

Go to video