Advanced Research Center for Nanolithography

‘Cutting-edge research in physics and materials science to advance nanolithography, strengthening the research system in nanolithography technology, and accelerating the transition from fundamental discovery to implementation in the semiconductor industry.’

ERC grant awarded for fast, non-invasive, 3D wafer metrology
- July 2, 2026
Dr. Peter Kraus has been awarded an ERC Proof of Concept grant to develop a new metrology technique using high-harmonic generation-driven extreme ultraviolet (EUV) scatterometry.
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Laser-induced shock waves in tin droplets produce high-speed microjets
- June 15, 2026
An unexpected observation led Dr. Randy Meijer and collaborators to investigate the formation of microjets in tin droplets. They found that short, consecutive, low-energy laser…
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Indirect EUV imaging with nanometer accuracy
- May 21, 2026
ARCNL researchers have demonstrated the use of high-harmonic generation for scatterometry with nanometer accuracy. This allows them to indirectly measure nanostructures without lenses, using shorter…
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WomenNetPhysics 2026 brings physicists together to strengthen inclusivity in the field
- May 19, 2026
On May 8, researchers from across the Netherlands gathered at Amsterdam Science Park for WomenNetPhysics 2026, the largest Dutch networking event dedicated to strengthening the…
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Interview

One year into partnership University of Groningen

How is it going and what to expect?

The University of Groningen joined the ARCNL public-private partnership as associate partner on January 1st, 2022. ARCNL group leader Ronnie Hoekstra and governing board member Caspar van der Wal reflect on the route towards this newly established partnership and on the challenges and advantages it offers.