- 100+ researchers
- 25+ nationalities
- 700+ publications
ARCNL Advanced Research Center for Nanolithography
ARCNL is a public-private research institute that studies the fundamental physics and chemistry of nanolithography, inspired by ongoing challenges in the semiconductor industry.
Latest news
“ARCNL performs fundamental research on the physics and chemistry of nanolithography, inspired by ongoing challenges in the semiconductor industry.”
Our research
Three departments, one technology
ARCNL’s research spans different aspects of nanolithography technology and is organized into three departments: Source, Metrology, and Materials.
What’s next
Upcoming events
Join ARCNL’s conferences, symposia and other events where researchers share latest developments in science and research.
Tomorrow’s scientists
Your future starts here
At ARCNL, bright young minds work side by side with leading researchers in both academia and industry — gaining hands-on experience, mentorship, and inspiration for the next step in their scientific career.
Perspectives that drive discovery and innovation
A pioneer in public-private partnerships
ARCNL is a public-private partnership, established in 2014 by the Dutch Research Council (NWO), the University of Amsterdam, the Vrije Universiteit and ASML. In 2022 the University of Groningen joined as associate partner. The institute is located at Amsterdam Science Park.