Research Groups
- Short-Wavelength Light Sources for EUV Metrology
- Ion Interactions
- Computational Imaging
- Contact Dynamics
- EUV Generation & Imaging
- EUV Plasma Processes
- High-Harmonic Generation & EUV Science
- Light-Matter Interaction
- Materials & Surface Science for EUVL
- Materials Theory and Modeling
- Nanoscale Imaging and Metrology
- Plasma Theory and Modeling
