dr. Stefan Witte

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Group leader: EUV Generation & Imaging

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CV / Biography

Stefan Witte received his PhD (cum laude) in 2007 from the Vrije Universiteit Amsterdam, for research on intense ultrafast laser development and precision spectroscopy with frequency combs. He did postdoctoral work at on nonlinear microscopy and biomedical imaging (Vrije Universiteit) and on ultrafast electron dynamics and lensless imaging with high-harmonic sources (JILA, University of Colorado). Since 2014 he works at the Advanced Research Center for Nanolithography (ARCNL), where he leads the EUV Generation and Imaging group at ARCNL and is the head of the Metrology Department. He is also an associate professor at the Vrije Universiteit Amsterdam. 


Presently, the EUV Generation and Imaging group works on coherent diffractive imaging (ptychography) with visible and extreme-ultraviolet radiation, high-harmonic generation and its applications, photo-acoustic imaging and metrology, and laser development. The major research theme is to develop methods for non-invasive 3D imaging of nanostructures, in particular for (but not limited to) semiconductor devices. 


Stefan was awarded an ERC Starting Grant in 2014, an ERC Consolidator Grant in 2019, and an NWO VICI grant in 2022. Also, he is a PI in the NWO-TTW Perspectief consortium LINX (Lensless Imaging with soft-X-rays).