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Roberto Fallica, Jarich Haitjema, Lianjia Wu, Sonia Castellanos, Albert M. Brouwer and Yasin Ekinci,
Absorption coefficient of metal-containing photoresists in the extreme ultraviolet
, J. Micro/Nanolith. MEMS MOEMS
17
, 2: 023505: 1-7 (2018)
Bart Weber, Yuki Nagata, Stefania Ketzetzi, Tang Fujie, Wilbert J. Smit, Huib J. Bakker, Ellen H.G. Backus, Mischa Bonn and Daniel Bonn,
Molecular Insight into the Slipperiness of Ice
, J. Phys. Chem. Lett.
9
, 2838-2842 (2018)
A. Bayerle, M.J. Deuzeman, S. van der Heijden, D. Kurilovich, R. de Faria Pinto, A. Stodolna, S. Witte, K.S.E. Eikema, W. Ubachs, R. Hoekstra and O.O. Versolato,
Sn ion energy distributions of ns- and ps-laser produced plasmas
, Plasma Sources Sci. Technol.
27
, 045001: 1-8 (2018)
Sonia Castellanos, Lianjia Wu, Milos Baljozovic, Giuseppe Portale, Dimitrios Kazazis, Michaela Vockenhuber, Yasin Ekinci and Thomas Jung:
Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists
In:
Extreme Ultraviolet (EUV) Lithography IX : SPIE Advanced Lithography held 25 February - 1 March 2018 San Jose, California, United States. - Bellingham: SPIE, 2018. - pp. 105830A: 1-12 (SPIE Proceedings; 10583)
L. Freisem, G.S.M. Jansen, D. Rudolf, K.S.E. Eikema and S. Witte,
Spectrally resolved single-shot wavefront sensing of broadband high-harmonic sources
, Opt. Express
26
, 6: 6860--6871 (2018)
B. Weber, T. Suhina, T. Junge, L. Pastewka, A.M. Brouwer and D. Bonn,
Molecular probes reveal deviations from Amontons' law in multi-asperity frictional contacts
, Nature Commun.
9
, 888:1-7 (2018)
F. Torretti, R. Schupp, D. Kurilovich, A. Bayerle, J. Scheers, W. Ubachs, R. Hoekstra and O.O. Versolato,
Short-wavelength out-of-band EUV emission from Sn laser-produced plasma
, J. Phys. B
51
, 045005: 1-9 (2018)
Dmitry Kurilovich, Mikhail M. Basko, Dmitrii A. Kim, Francesco Torretti, Ruben Schupp, Jim C. Visschers, Joris Scheers, Ronnie Hoekstra, Wim Ubachs and Oscar O. Versolato,
Power-law scaling of plasma pressure on laser-ablated tin microdroplets
, Phys. Plasmas
25
, 012709: 1-10 (2018)
A. Thete, D. Geelen, S.J. van der Molen and R.M. Tromp,
Charge catastrophe and dielectric breakdown during exposure of organic thin films to low-energy electron radiation
, Phys. Rev. Lett.
119
, 26: 266803: 1-6 (2017)
Joost W.M. Frenken:
Van grensvlakfysica tot nanolithografie
In:
Natuurkundige Voordrachten 2016-2017 :. - s.l.: Koninklijke Maatschappij voor Natuurkunde Diligentia, 2017. (Jaarboek van de Koninklijke Maatschappij voor Natuurkunde onder de zinspreuk Diligentia; 96)
