Nanoscale Imaging and Metrology
Group leader: Dr. Lyuba Amitonova
Nanoscale Imaging and Metrology
Nanoscale Imaging and Metrology group focuses on the advanced imaging, sensing and metrology tools. Our ultimate goal is imaging beyond the limits. We are developing new label-free far-field imaging techniques with a spatial resolution beyond the Abbe (diffraction) limit and temporal resolution beyond the Nyquist limit. This will enable fast and accurate characterization of 3D multi-layer nanostructures and pave the way for better metrology tools for tomorrow’s nanolithography. The group’s research connects several modern and dynamic scientific fields: computational imaging, complex wavefront shaping, compressive sensing, endo-microscopy and optical metrology.
Lyuba Amitonova – Quantum Metrology & Laser Applications – ARCNL – Department of Physics and Astronomy
