Our Mission
Research
Career
Directory
x close
Search
Publications
Category
Articles
Proceedings
Theses
L. Wu, M. Vockenhuber, Y. Ekinci and S. Castellanos:
The role of the organic shell in hybrid molecular materials for EUV lithography
In:
Proc. SPIE 10957, Extreme Ultraviolet (EUV) Lithography X, , 2019.
N. Thakur, M. Vockenhuber, Y. Ekinci and S. Castellanos:
Zinc-based metal oxoclusters: towards enhanced EUV absorptivity
In:
Proc. SPIE 10957, Extreme Ultraviolet (EUV) Lithography X, , 2019.
X. Zhou, F.-C. Hsia, Y. Xue, D.-M. Tang, O. Cretu, C. Zhang, M. Mitome, Y. Bando, T. Sasaki and D. Golberg,
Tunable Mechanical and Electrical Properties of Coaxial BN-C Nanotubes
, Phys Status Solidi Rapid Res Lett
13
, 3: 1800576: 1-7 (2019)
D.W. van Baarle, S.Yu. Krylov, M.E.S. Beck and J.W.M. Frenken,
On the non-trivial origin of atomic-scale patterns in friction force Microscopy
, Tribol Lett
67
, 15 (2019)
L. Wu, M. Baliozovic, G. Portale, D. Kazazis, M. Vockenhuber, T. Jung, Y. Ekinci and S. Castellanos,
Mechanistic insights in Zr-, and Hf-based molecular hybrid EUV photoresists
, J. Micro/Nanolith. MEMS and MOEMS
18
, 1 (2019)
Y. Suchorski, M. Datler, I. Bespalov, J. Zeininger, M. Stoeger-Pollach, J. Bernardi, H. Groenbeck and G. Rupprechter,
Surface-Structure Libraries: Multifrequential Oscillations in Catalytic Hydrogen Oxidation on Rhodium
, J. Phys. Chem. C
123
, 7: 4217-4227 (2019)
D. Bodewits and R. Hoekstra,
Charge-Exchange Emission from Hydrogen-Like Carbon Ions Colliding with Water Molecules
, Atoms
7
, 1: 17: 1-11 (2019)
L. Wu, M. Tiekink, A. Giuliani, L. Nahon and S. Castellanos,
Tuning photoionization mechanisms of molecular hybrid materials for EUV lithography applications
, J.Mater.Chem.C
7
, 1: 33-37 (2019)
F.-C. Hsia, D.-M. Tang, W. Jevasuwan, N. Fukata, X. Zhou, M. Mitome, Y. Bando, T.E.M. Nordling and D. Golberg,
Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by in situ transmission electron microscopy
, Nanoscale Adv.
1
, 5: 1784-1790 (2019)
D. Petrova, B. Weber, C. Allain, P. Audebert, D. Bonn and A.M. Brouwer,
Fast 3D Microscopy Imaging of Contacts Between Surfaces Using a Fluorescent Liquid
, Appl.Mater.Interfaces
10
, 48: 40973-40977 (2018)
