Short-Wavelength Light Sources for EUV Metrology
Group leaders: Dr. Angana Mondal
Short-Wavelength Light Sources for EUV Metrology
The Short-Wavelength Light Sources for EUV Metrology group uses novel materials to develop light sources in the extreme-ultraviolet to soft-X-ray range. These light sources can then be used for non-invasive precision measurements during the computer chip manufacturing process.
Group leader Angana Mondal
Angana Mondal leads the group as a McGillavry fellow and Assistant Professor at the University of Amsterdam. She has made pioneering contributions to research on high-harmonic generation in liquids, and her current research interests expand on this to include diverse novel materials as potential short-wavelength light sources.
