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EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
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Bachelor Thesis
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Y.H. Liu, H. Zhang, Y. Luo, L. Wang and C. Xiao,
Probing the low friction mechanism of hydrogen-free DLC film in oxygen and nitrogen environments by first-principles calculations and molecular dynamics simulation
, Surf. Coat. Technol.
455
, 129219: 1-11 (2023)
Y.M. Fan, E. Olsson, G.M. Liang, Z.J. Wang, A.M. D'Angelo, B. Johannessen, L. Thomsen, B. Cowie, L. Jingxi, F. Zhang, Y. Zhao, W.K. Pang, Q. Cai and Z. Guo,
Stabilizing Cobalt‐free Li‐rich Layered Oxide Cathodes through Oxygen Lattice Regulation by Two‐phase Ru Doping
, Angew. Chem. Int. Ed.
62
, (5), e20221380: 1-9 (2023)
S. van Vliet, A. Troglia, E. Olsson and R. Bliem,
Identifying silicides via plasmon loss satellites in photoemission of the Ru-Si system
, Appl. Surf. Sci.
608
, 155139: 1-6 (2023)
T. van Gardingen-Cromwijk, M. Adhikary, C. Messinis, S. Konijnenberg, W.M.J. Coene, S. Witte, J.F. de Boer and A.J. den Boef,
Field-position dependent apodization in dark-field digital holographic microscopy for semiconductor metrology
, Opt. Express
31
, (1), 411-425 (2023)
B. Weber, J. Scheibert, M.P. de Boer and A. Dhinojwala,
Experimental insights into adhesion and friction between nominally dry rough surfaces
, MRS Bulletin
47
, (12), 1237-1246 (2022)
L. Peng, F.-C. Hsia, S. Woutersen, M. Bonn, B. Weber and D. Bonn,
Nonmonotonic Friction due to Water Capillary Adhesion and Hydrogen Bonding at Multiasperity Interfaces
, Phys. Rev. Lett.
129
, (25), 256101: 1-6 (2022)
A.M. Brouwer,
Chemical Mechanisms of Metal-Based Extreme Ultraviolet Resists
, J. Photopolym. Sci. Technol.
35
, (1), 81-86 (2022)
Q. Evrard, N. Sadegh, Y. Ekinci, M. Vockenhuber, N. Mahne, A. Giglia, S. Nannarone, T. Goya, T. Sugioka and A.M. Brouwer,
Influence of Counteranions on the Performance of Tin-based EUV Photoresists
, J. Photopolym. Sci. Technol.
35
, (1), 95-100 (2022)
Y. Huo, M.K. Espinoza Cangahuala, M. Goulart, V. Zamudio-Bayer, M. Kubin, M. Timm, J.T. Lau, B. von Issendorff, R. Hoekstra, S. Faraji and T. Schlathölter,
Soft-x-ray spectroscopy of coronene+ and (coronene+H)+ cations: The influence of hydrogenation on electronic structure and photofragmentation
, Phys. Rev. A
106
, (6), 063104: 1-11 (2022)
A. Troglia, Victor Vollema, S. Cassanelli, E. van Heumen, J. van de Groep, A. de Visser and R. Bliem,
Tuning material properties via disorder: From crystalline alloy to metallic glass
, Mater. Today Phys.
29
, 100893: 1-8 (2022)
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Mission
Research
Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
Career
Career
All vacancies
Postdoc vacancies
PhD vacancies
Scientific internships
Support vacancies
Career
How to apply
Coming from abroad
Candidate portal
More
More
People
News
Events
Repository
Contact & Directions
ARCNL Newsletter