Publications - Articles

R. Röhrich, G. Oliveri, S. Kovaios, V.T. Tenner, A. den Boef, J.T.B. Overvelde and A.F. Koenderink, Uncertainty estimation and design optimization of 2D diffraction-based overlay metrology targets, ACS Photonics, (2020)
Z. Bouza, J. Scheers, A.N. Ryabtsev, R. Schupp, L. Behnke, C. Shah, J. Sheil, M. Bayraktar, J.R. Crespo López-Urrutia, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato, EUV spectroscopy of Sn5-Sn10+ions in an electron beam ion trap and laser-produced plasmas, J. Phys. B: At. At. Mol. Opt. Phys. 53, 19: 195001: 1-11 (2020)
V. Verrina, S. Edward, H. Zhang, S. Witte and P.C.M. Planken, Photoacoustic detection of low duty cycle gratings through optically opaque layers, Appl.Phys.Lett. 117, 5: 051104: 1-6 (2020)
S. Edward, H. Zhang, S. Witte and P.C.M. Planken, Laser-induced ultrasonics for detection of low-amplitude grating through metal layers with finite roughness, Opt. Express 28, 16: 23374-23387 (2020)
J. Scheers, R. Schupp, R.A. Meijer, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato, Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma, Phys.Rev.E 102, 1: 013204: 1-9 (2020)
S. Edward, H. Zhang, I. Setija, V. Verrina, A. Antoncecchi, S. Witte and P.C.M. Planken, Detection of hidden gratings through multilayer nanostructures using light and sound, Phys. Rev. Appl. 14, 1: 014015-1-16 (2020)
N. Thakur, A. Giuliani, L. Nahon and S. Castellanos, Photon-induced Fragmentation of Zinc-based Oxoclusters for EUV Lithography Applications, J. Photopolym. Sci. Tec. 33, 2: 153-158 (2020)
N. Sadegh, M. Geest, J. Haitjema, F. Campi, S. Castellanos, P.M. Kraus and A.M. Brouwer, XUV Induced Bleaching of a Tin Oxo Cage Photoresist Studied by High Harmonic Absorption Spectroscopy, J. Photopolymer. Sci.Tec. 33, 2: 145-151 (2020)
O. Lugier, A. Troglia, N. Sadegh, L. Kessel, R. Bliem, N. Mahne, S. Nannarone and S. Castellanos, Extreme Ultraviolet Photoelectron Spectroscopy on Fluorinated Monolayers: towards Nanolithography on Monolayers, J. Photopolym. Sci. Tec. 33, 2: 229-234 (2020)
H. Zhang, J.-P. Colombier and S. Witte, Laser-induced periodic surface structures: Arbitrary angles of incidence and polarization states, Phys.Rev.B 101, 24: 245430: 1-15 (2020)

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