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EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
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Y. Zhang, J. Haitjema, M. Baljozovic, M. Vockenhuber, D. Kazazis, T. Jung, Y. Ekinci and A.M. Brouwer,
Dual-tone Application of a Tin-Oxo Cage Photoresist Under E-beam and EUV Exposure
, J. Photopolymer. Sci.Tec.
31
, (2), 249-255 (2018)
G.S.M. Jansen, A.C.C. de Beurs, X. Liu, K.S.E. Eikema and S. Witte,
Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging
, Opt. Express
26
, (10), 12479-12489 (2018)
R. Fallica, J. Haitjema, L. Wu, S. Castellanos Ortega, A.M. Brouwer and Y. Ekinci,
Absorption coefficient of metal-containing photoresists in the extreme ultraviolet
, J. of Micro/Nanolithography. MEMS and MOEMS
17
, (2), 023505: 1-7 (2018)
B. Weber, Y. Nagata, S. Ketzetzi, F. Tang, W.J. Smit, H.J. Bakker, E.H.G. Backus, D. Bonn and M. Bonn,
Molecular Insight into the Slipperiness of Ice
, J. Phys. Chem. Lett.
9
, (11), 2838-2842 (2018)
C.J. Kaplan, P.M. Kraus, A.D. Ross, M. Zürch, S.K. Cushing, M.F. Jager, H.-T. Chang, E.M. Gullikson, D.M. Neumark and S.R. Leone,
Femtosecond tracking of carrier relaxation in germanium with extreme ultraviolet transient reflectivity
, Phys. Rev. B
97
, (20), 205202: 1-9 (2018)
R.V. Mom, O. Ivashenko, J.W.M. Frenken, I.M.N. Groot and A.O. Sjastad,
Nucleation, Alloying, and Stability of Co–Re Bimetallic Nanoparticles on Al2O3/NiAl(110)
, J. Phys. Chem. C
122
, (16), 8967-8975 (2018)
J.L. Ellis, K.M. Dorney, D.D. Hickstein, N.J. Brooks, C. Gentry, C. Hernández-García, D. Zusin, J.M. Shaw, Q.L. Nguyen, C.A. Mancuso, G.S. Jansen, S. Witte, H.C. Kapteyn and M.M. Murnane,
High harmonics with spatially varying ellipticity
, Optica
5
, (4), 479-485 (2018)
P.M. Kraus and H.J. Wörner,
Perspectives of Attosecond Spectroscopy for the Understanding of Fundamental Electron Correlations
, Angew. Chem. Int. Ed.
57
, (19), 5228-5247 (2018)
A. Bayerle, M.J. Deuzeman, S. van der Heijden, D. Kurilovich, T. de Faria Pinto, A. Stodolna, S. Witte, K.S.E. Eikema, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Sn ion energy distributions of ns- and ps-laser produced plasmas
, Plasma Sources Sci. Technol.
27
, 045001:1-8 (2018)
S. Castellanos Ortega, L. Wu, M. Baljozovic, G. Portale, D. Kazazis, M. Vockenhuber, Y. Ekinci and T. Jung:
Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists
In:
Extreme Ultraviolet (EUV) Lithography IX : SPIE Advanced Lithography, SPIE-Intl Soc Optical Eng, 2018. - pp. 105830A: 1-12 (Proceedings SPIE; 10583)
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Mission
Research
Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
Career
Career
All vacancies
Postdoc vacancies
PhD vacancies
Scientific internships
Support vacancies
Career
How to apply
Coming from abroad
Candidate portal
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More
People
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Repository
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ARCNL Newsletter