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EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
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H. Gelderblom and O.O. Versolato,
Laserschieten op tindruppels
, NTvN
83
, (11), 382-385 (2017)
P. Antonov,
Towards thermo- and superlubricity on the macroscopic scale : from nanostructures to graphite and graphene lubrication
, Leiden University, 2017-10-18
J. Haitjema, Y. Zhang, M. Vockenhuber, D. Kazazis, Y. Ekinci and A.M. Brouwer,
Extreme ultraviolet patterning of tin-oxo cages
, J. of Micro/Nanolithography. MEMS and MOEMS
16
, (3), 033510:1-7 (2017)
R.A. Meijer, A. Stodolna, K.S.E. Eikema and S. Witte,
High-energy Nd:YAG laser system with arbitrary sub-nanosecond pulse shaping capability
, Opt. Lett.
42
, (14), 2758-2761 (2017)
Y. Zhang, J. Haitjema, X. Liu, F.O.L. Johansson, A. Lindblad, S. Castellanos Ortega, N. Ottosson and A.M. Brouwer,
Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy
, J. of Micro/Nanolithography. MEMS and MOEMS
16
, (2), 123510: 1-7 (2017)
J. Haitjema, Y. Zhang, N. Ottosson and A.M. Brouwer,
Photoreactions of Tin Oxo Cages, Model EUV Photoresists
, J. Photopolym. Sci. Technol.
30
, (1), 99-102 (2017)
F. Torretti, A. Windberger, A.N. Ryabtsev, S. Dobrodey, H. Bekker, W.M.G. Ubachs, R. Hoekstra, E.V. Kahl, J.C. Berengut, J.R. Crespo López-Urrutia and O.O. Versolato,
Optical spectroscopy of complex open-4d-shell ions Sn7+–Sn10+
, Phys. Rev. A
95
, 042503: 1-16 (2017)
O.O. Versolato,
Boxing with tin droplets
, Amsterdam Sci.
3
, (5) (2017)
Y. Zhang, J. Haitjema, X. Liu, F.O.L. Johansson, A. Lindblad, S. Castellanos Ortega, N. Ottosson and A.M. Brouwer:
Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy
In:
Advances in Patterning Materials and Processes XXXIV : conference held in San Jose, California, February 26, 2017 /ed. C.K. Hohle and R. Gronheid, SPIE-Intl Soc Optical Eng, 2017. - pp. 1014606: 1-10 (Proceedings SPIE; 10146)
J. Haitjema, Y. Zhang, M. Vockenhuber, D. Kazazis, Y. Ekinci and A.M. Brouwer:
Extreme ultraviolet patterning of tin-oxo cages
In:
Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII /ed. E.M. Panning and K.A. Goldberg, SPIE-Intl Soc Optical Eng, 2017. - pp. 1014325: 1-10 (Proceedings SPIE;)
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Mission
Research
Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
Career
Career
All vacancies
Postdoc vacancies
PhD vacancies
Scientific internships
Support vacancies
Career
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Coming from abroad
Candidate portal
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ARCNL Newsletter