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EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
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I. Bespalov, Y. Zhang, J. Haitjema, R.M. Tromp, S.J. van der Molen, A.M. Brouwer, J. Jobst and S. Castellanos Ortega,
The Key Role of Very-Low-Energy-Electrons in Tin-based Molecular Resists for Extreme Ultraviolet Nanolithography
, ACS Appl. Mater. Interfaces
12
, (8), 9881-0889 (2020)
F.-C. Hsia, F.M. Elam, D. Bonn, B. Weber and S.E. Franklin,
Wear particle dynamics drive the difference between repeated and non-repeated reciprocated sliding
, Tribol.Int.
142
, 105983: 1-8 (2020)
F. Torretti, F. Liu, M. Bayraktar, J. Scheers, Z. Bouza, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Spectral characterization of an industrial EUV light source for nanolithography
, J. Phys. D: Appl. Phys.
53
, (5), 055204: 1-7 (2020)
L.V. Amitonova and J.F. de Boer,
Sensitivity analysis of Raman endoscopy with and without wavefront shaping
, Opt. Express
28
, (3), 3779-3788 (2020)
D. Kim, R. Bliem, F. Hess, J.-J. Gallet and B. Yildiz,
Electrochemical Polarization Dependence of the Elastic and Electrostatic Driving Forces to Aliovalent Dopant Segregation on LaMnO3
, J. Am. Chem. Soc.
142
, (7), 3548-3563 (2020)
H. Zhang, A. Antoncecchi, S. Edward, I. Setija, P.C.M. Planken and S. Witte,
Unraveling Phononic, Optoacoustic, and Mechanical Properties of Metals with Light-Driven Hypersound
, Phys. Rev. Appl.
13
, (1), 014010: 1-14 (2020)
D. Petrova, B. Weber, C. Allain, P. Audebert, C.H. Venner, A.M. Brouwer and D. Bonn,
Fluorescence microscopy visualization of the roughness-induced transition between lubrication regimes
, Sci. Adv.
5
, (12), eaaw4761: 1-9 (2019)
D. Bonn and J.W.M. Frenken,
Tunable superlubricity of 2-dimensional materials
, PNAS
116
, (49), 24386-24387 (2019)
N. Thakur, L.T. Tseng, M. Vockenhuber, Y. Ekinci and S. Castellanos Ortega,
Stability studies on a sensitive EUV photoresist based on zinc metal oxoclusters
, J. of Micro/Nanolithography. MEMS and MOEMS
18
, (4), 043504: 1-11 (2019)
M. Du, K.S.E. Eikema and S. Witte,
Computational-imaging-based optical coherence tomography in time- and frequency-domain
, OSA Continuum
2
, (11), 3141-3152 (2019)
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Mission
Research
Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
Career
Career
All vacancies
Postdoc vacancies
PhD vacancies
Scientific internships
Support vacancies
Career
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Coming from abroad
Candidate portal
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More
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