Publications - EUV Generation & Imaging - ARCNL

C. Messinis, T.T.M. van Schaijk, N. Pandey, V.T. Tenner, S. Witte, J.F. de Boer and A.J. den Boef, Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms, Opt. Express 28, (25), 37419-37435 (2020)
A. Schulte, J. Mathijssen, K.S.E. Eikema and S. Witte: Towards High Harmonic Generation in Laser-Produced Plasma In: OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS), paper ETh3A.4, OSA Technical Digest (Optical Society of America), 2020.
A. Antoncecchi, H. Zhang, S. Edward, V. Verrina, P.C.M. Planken and S. Witte, High-resolution microscopy through optically opaque media using ultrafast photoacoustics, Opt. Express 28, (23), 33937-33947 (2020)
V. Verrina, S. Edward, H. Zhang, A. Antoncecchi, S. Witte and P.C.M. Planken, Role of scattering by surface roughness in the photoacoustic detection of hidden micro-structures, Appl. Opt. 59, (30), 9499-9509 (2020)
V. Verrina, S. Edward, H. Zhang, S. Witte and P.C.M. Planken, Photoacoustic detection of low duty cycle gratings through optically opaque layers, Appl. Phys. Lett. 117, (5), 051104: 1-6 (2020)
S. Patra, M. Germann, J.-Ph. Karr, M. Haidar, L. Hilico, V.I. Korobov, F. M. J. Cozijn, K.S.E. Eikema, W.M.G. Ubachs and J.C.J. Koelemeij, Proton-electron mass ratio from laser spectroscopy of HD+ at the part-per-trillion level, Science 369, (6508), 1238-1241 (2020)
S. Edward, H. Zhang, S. Witte and P.C.M. Planken, Laser-induced ultrasonics for detection of low-amplitude grating through metal layers with finite roughness, Opt. Express 28, (16), 23374-23387 (2020)
S. Edward, H. Zhang, I. Setija, V. Verrina, A. Antoncecchi, S. Witte and P.C.M. Planken, Detection of hidden gratings through multilayer nanostructures using light and sound, Phys. Rev. Appl. 14, (1), 014015-1-16 (2020)
C. Messinis, T.T.M. van Schaijk, V.T. Tenner, J.F. de Boer, S. Witte and A.J. den Boef: Parallel Acquisition of Multiple Images Using Coherence Gating in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology In: Imaging and Applied Optics Congress, paper CF4C.6, OSA Technical Digest (Optical Society of America), 2020.
H. Zhang, J.-P. Colombier and S. Witte, Laser-induced periodic surface structures: Arbitrary angles of incidence and polarization states, Phys. Rev. B 101, (24), 245430: 1-15 (2020)

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