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Lens Aberration Calibration and Correction with Plasmonic Nanoparticles in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

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DOI http://dx.doi.org/10.1364/cosi.2021.cf2e.7
Reference C. Messinis, T.T.M. van Schaijk, N. Pandey, A. Koolen, J.F. de Boer, S. Witte and A.J. den Boef: Lens Aberration Calibration and Correction with Plasmonic Nanoparticles in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology In: Computational Optical Sensing and Imaging 2021 (COSI), Part of OSA Imaging and Applied Optics Congress 2021, paper CF2E.7, OSA Technical Digest (Optical Society of America), 2021.
Groups Computational Imaging, EUV Generation & Imaging

We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.

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