aPIE: Angle calibration algorithm for reflection ptychography

Publication date	23 July 2021
DOI	http://dx.doi.org/10.1364/cosi.2021.cw6b.4
Reference	A.C.C. de Beurs, L. Loetgering, M. Herczog, K.S.E. Eikema and S. Witte: aPIE: Angle calibration algorithm for reflection ptychography In: OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP), paper CW6B.4, OSA Technical Digest (Optical Society of America), 2021.
Group	EUV Generation & Imaging

We demonstrate a tilt angle self-calibration technique for reflection mode ptychography. Experiments show accurate angle retrieval and improved image reconstruction, with spatially structured beams outperforming beams with smooth profiles