Publications - Proceedings - ARCNL

Y. Zhang, J. Haitjema, X. Liu, F.O.L. Johansson, A. Lindblad, S. Castellanos Ortega, N. Ottosson and A.M. Brouwer: Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy In: Advances in Patterning Materials and Processes XXXIV : conference held in San Jose, California, February 26, 2017 /ed. C.K. Hohle and R. Gronheid, SPIE-Intl Soc Optical Eng, 2017. - pp. 1014606: 1-10 (Proceedings SPIE; 10146)
R. Fallica, J. Haitjema, L. Wu, S. Castellanos Ortega, A.M. Brouwer and Y. Ekinci: Absorption and exposure kinetics of photoresists at EUV In: Proceedings SPIE /ed. E.M. Panning and K.A. Goldberg, SPIE-Intl Soc Optical Eng, 2017. - pp. 101430A: 1-11
J. Haitjema, Y. Zhang, M. Vockenhuber, D. Kazazis, Y. Ekinci and A.M. Brouwer: Extreme ultraviolet patterning of tin-oxo cages In: Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII /ed. E.M. Panning and K.A. Goldberg, SPIE-Intl Soc Optical Eng, 2017. - pp. 1014325: 1-10 (Proceedings SPIE;)

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