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EUV Plasma Processes
Group leaders:
Dr. Oscar Versolato
/
Prof. dr. Ronnie Hoekstra
/
Prof. dr. Wim Ubachs
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R. Schupp, F. Torretti, R.A. Meijer, M. Bayraktar, J. Sheil, J. Scheers, D. Kurilovich, A. Bayerle, A.A. Schafgans, M. Purvis, K.S.E. Eikema, S. Witte, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma
, Appl.Phys.Lett.
115
, 12: 124101: 1-6 (2019)
S. Schippers, E. Sokell, F. Aumayr, H. Sadeghpour, K. Ueda, I. Bray, K. Bartschat, A. Murray, J. Tennyson, A. Dorn, M. Yamazaki, M. Takahashi, N. Mason, O. Novotný, A. Wolf, L. Sanche, M. Centurion, Y. Yamazaki, G. Laricchia, C.M. Surko, J. Sullivan, G. Gribakin, D.W. Savin, Y. Ralchenko, R. Hoekstra and G. O’Sullivan,
Roadmap on photonic, electronic and atomic collision physics: II. Electron and antimatter interactions
, J. Phys. B: At. At. Mol. Opt. Phys.
52
, 17: 171002: 1-49 (2019)
O.O. Versolato,
Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
, Plasma Sources Sci. Technol.
28
, 8: 083001:1-17 (2019)
R. Schupp, F. Torretti, R.A. Meijer, M. Bayraktar, J. Scheers, D. Kurilovich, A. Bayerle, K.S.E. Eikema, S. Witte, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Efficient generation of extreme ultraviolet light from Nd:YAG-driven microdroplet-tin plasma
, Phys. Rev. Applied
12
, 1: 014010: 1-11 (2019)
M.J. Deuzeman,
Generation and interactions of energetic tin ions
, University of Groningen, 2019-06-21
D. Kurilovich,
Laser-induced dynamics of liquid tin microdroplets
, VU University Amsterdam, 2019-04-04
D. Bodewits and R. Hoekstra,
Charge-Exchange Emission from Hydrogen-Like Carbon Ions Colliding with Water Molecules
, Atoms
7
, 1: 17: 1-11 (2019)
J. Scheers, A. Ryabtsev, A. Borschevsky, J.C. Berengut, K. Haris, R. Schupp, D. Kurilovich, F. Torretti, A. Bayerle, E. Eliav, W.M.G. Ubachs, O.O. Versolato and R. Hoekstra,
Energy-level structure of Sn3+ ions
, Phys. Rev. A
98
, 6: 062503: 1-12 (2018)
L.S. Dreissen, H.F. Schouten, W.M.G. Ubachs, S.B. Raghunathan and T.D. Visser,
Active Two-Dimensional Steering of Radiation from a Nanoaperture
, Nano Lett.
18
, 11: 7207-7210 (2018)
D. Kurilovich, T. de Faria Pinto, F. Torretti, R. Schupp, J. Scheers, A. Stodolna, H. Gelderblom, K.S.E. Eikema, S. Witte, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Expansion Dynamics after Laser-Induced Cavitation in Liquid Tin Microdroplets
, Phys. Rev. Appl.
10
, 5: 054005: 1-8 (2018)
