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EUV Plasma Processes
Group leaders:
Dr. Oscar Versolato
/
Prof. dr. Ronnie Hoekstra
/
Prof. dr. Wim Ubachs
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B. Liu, D. Kurilovich, H. Gelderblom and O.O. Versolato,
Mass loss from a stretching semitransparent sheet of liquid tin
, , (2020)
F. Torretti,
Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography
, VU University Amsterdam, 2019-12-19
F. Torretti, F. Liu, M. Bayraktar, J. Scheers, Z. Bouza, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Spectral characterization of an industrial EUV light source for nanolithography
, J. Phys. D: Appl. Phys.
53
, 5: 055204: 1-7 (2019)
R. Schupp, F. Torretti, R.A. Meijer, M. Bayraktar, J. Sheil, J. Scheers, D. Kurilovich, A. Bayerle, A.A. Schafgans, M. Purvis, K.S.E. Eikema, S. Witte, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma
, Appl.Phys.Lett.
115
, 12: 124101: 1-6 (2019)
S. Schippers, E. Sokell, F. Aumayr, H. Sadeghpour, K. Ueda, I. Bray, K. Bartschat, A. Murray, J. Tennyson, A. Dorn, M. Yamazaki, M. Takahashi, N. Mason, O. Novotný, A. Wolf, L. Sanche, M. Centurion, Y. Yamazaki, G. Laricchia, C.M. Surko, J. Sullivan, G. Gribakin, D.W. Savin, Y. Ralchenko, R. Hoekstra and G. O’Sullivan,
Roadmap on photonic, electronic and atomic collision physics: II. Electron and antimatter interactions
, J. Phys. B: At. At. Mol. Opt. Phys.
52
, 17: 171002: 1-49 (2019)
O.O. Versolato,
Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
, Plasma Sources Sci. Technol.
28
, 8: 083001:1-17 (2019)
R. Schupp, F. Torretti, R.A. Meijer, M. Bayraktar, J. Scheers, D. Kurilovich, A. Bayerle, K.S.E. Eikema, S. Witte, W.M.G. Ubachs, R. Hoekstra and O.O. Versolato,
Efficient generation of extreme ultraviolet light from Nd:YAG-driven microdroplet-tin plasma
, Phys. Rev. Applied
12
, 1: 014010: 1-11 (2019)
M.J. Deuzeman,
Generation and interactions of energetic tin ions
, University of Groningen, 2019-06-21
D. Kurilovich,
Laser-induced dynamics of liquid tin microdroplets
, VU University Amsterdam, 2019-04-04
D. Bodewits and R. Hoekstra,
Charge-Exchange Emission from Hydrogen-Like Carbon Ions Colliding with Water Molecules
, Atoms
7
, 1: 17: 1-11 (2019)
