Group leader: Dr. Oscar Versolato
EUV Plasma Processes
The core expertise and interests of the EUV Plasma Processes group are in the physics of EUV-light-generating laser-produced plasma. The group employs a tin microdroplet generator to provide targets for ARCNL’s high-energy pulsed solid-state laser systems which generate a hot and very dense plasma from them. The group studies this plasma at the aggregate and the fundamental level: that liquids and gases, and the constituent electrons, atoms, and ions. This broad range of studies provides many interesting physics challenges.
ARCNL Source Research: physics challenges
- Understand exploding tin microdroplets – What determines deformation and fragmentation?
- Key insights to enable source predictive modeling – What emits that EUV light?
- Push the fundamental limits of the conversion efficiency of laser light into useful EUV photons – What sets the fundamental limit?
- Control expansion dynamics of laser-produced plasma – What is the cause of the ion energy distribution, how can it be controlled, and what does it cause?
Understand exploding tin microdroplets
What determines deformation and fragmentation?
Key insights to enable source predictive modeling
What emits that EUV light?
Push the fundamental limits of the conversion efficiency of laser light into useful EUV photons
What sets the fundamental limit?
Control expansion dynamics of laser-produced plasma
What is the cause of the ion energy distribution, how can it be controlled, and what does it cause?
