Publications - EUV Plasma Processes - ARCNL

I. Babenko, Y. Mostafa, Z. Bouza, O.O. Versolato and M. Bayraktar, Spectral and spatial resolution of an extreme ultraviolet broadband imaging spectrometer based on dispersion-matched zone plates, AIP Advances 14, (10), 105021: 1-7 (2024)
S.J.J. de Lange, D.J. Hemminga, Y. Mostafa, R.A. Meijer, O.O. Versolato and J. Sheil, Modeling the hundreds-of-nanoseconds-long irradiation of tin droplets with a 2 textmu m-wavelength laser for future EUV lithography, Plasma Sources Sci. Technol. 33, (10), 105003: 1-14 (2024)
J. Sheil, L. Poirier, A.C. Lassise, D.J. Hemminga, S. Schouwenaars, N. Braaksma, A. Frenzel, R. Hoekstra and O.O. Versolato, Power-Law Scaling Relating the Average Charge State and Kinetic Energy in Expanding Laser-Driven Plasmas, Phys. Rev. Lett. 133, (12), 125101: 1-6 (2024)
L. Assink, J. Brötzner, C. Cupak, M. Salverda, H.T. Jonkman, O.O. Versolato, R.A. Wilhelm and R. Hoekstra, On the question whether surface roughness can explain the absence of a prominent single-collision peak in keV heavy-ion scattering off a polycrystalline Ru surface, Nucl. Instrum. Methods. Phys. Res., Sect B 554, 165442: 1-6 (2024)
K. Bijlsma, Electron capture in collisions of tin ions with molecular hydrogen, University of Groningen, 2024-06-18
H.K. Schubert, D.J. Engels, R.A. Meijer, B. Liu and O.O. Versolato, Scaling relations in laser-induced vaporization of thin free-flying liquid metal sheets, Phys. Rev. Res. 6, (2), 023182: 1-12 (2024)
S.R. Totorica, K. Lezhnin, D.J. Hemminga, J. Gonzales Muñoz, J. Sheil, A. Diallo, A. Hyder and W. Fox, Acceleration mechanisms of energetic ion debris in laser-driven tin plasma EUV sources, Appl. Phys. Lett. 124, (17), 174101: 1-8 (2024)
K. Mongey, S.J.J. de Lange, R. Brady, D.J. Hemminga, B. Delaney, M.M. Basko, E. Sokell, F. O'Reilly and J. Sheil, Characterization of experimental and simulated micrometer-scale soft x-ray-emitting laser plasmas: Toward predictive radiance calculations, Appl. Phys. Lett. 124, (10), 102104 : 1-7 (2024)
D.J. Engels, R.A. Meijer, H.K. Schubert, W.J. van der Zande, W.M.G. Ubachs and O.O. Versolato, High-resolution spectroscopic imaging of atoms and nanoparticles in thin film vaporization, Appl. Phys. Lett. 123, (25), 254102 : 1-7 (2023)
Y. Mostafa, L. Behnke, D.J. Engels, Z. Bouza, J. Sheil, W.M.G. Ubachs and O.O. Versolato, Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma, Appl. Phys. Lett. 123, (23), 234101: 1-7 (2023)

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