Publications - EUV Plasma Processes - ARCNL

K. Bijlsma, Electron capture in collisions of tin ions with molecular hydrogen, University of Groningen, 2024-06-18
H.K. Schubert, D.J. Engels, R.A. Meijer, B. Liu and O.O. Versolato, Scaling relations in laser-induced vaporization of thin free-flying liquid metal sheets, Phys. Rev. Res. 6, (2), 023182: 1-12 (2024)
S.R. Totorica, K. Lezhnin, D.J. Hemminga, J. Gonzales Muñoz, J. Sheil, A. Diallo, A. Hyder and W. Fox, Acceleration mechanisms of energetic ion debris in laser-driven tin plasma EUV sources, Appl. Phys. Lett. 124, (17), 174101: 1-8 (2024)
K. Mongey, S.J.J. de Lange, R. Brady, D.J. Hemminga, B. Delaney, M.M. Basko, E. Sokell, F. O'Reilly and J. Sheil, Characterization of experimental and simulated micrometer-scale soft x-ray-emitting laser plasmas: Toward predictive radiance calculations, Appl. Phys. Lett. 124, (10), 102104 : 1-7 (2024)
D.J. Engels, R.A. Meijer, H.K. Schubert, W.J. van der Zande, W.M.G. Ubachs and O.O. Versolato, High-resolution spectroscopic imaging of atoms and nanoparticles in thin film vaporization, Appl. Phys. Lett. 123, (25), 254102 : 1-7 (2023)
Y. Mostafa, L. Behnke, D.J. Engels, Z. Bouza, J. Sheil, W.M.G. Ubachs and O.O. Versolato, Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma, Appl. Phys. Lett. 123, (23), 234101: 1-7 (2023)
D.J. Hemminga, Single-fluid radiation-hydrodynamic modeling of laser-driven EUV-emitting plasmas, VU University Amsterdam, 2023-11-20
R.A. Wilhelm, M.J. Deuzeman, S. Rai, W. Husinsky, P.S. Szabo, H. Biber, R. Stadlmayr, C. Cupak, J. Hundsbichler, C. Lemell, M. Möller, A. Mutzke, G. Hobler, O.O. Versolato, F. Aumayr and R. Hoekstra, On the missing single collision peak in low energy heavy ion scattering, Nucl. Instrum. Methods. Phys. Res., Sect B 544, 165123: 1-12 (2023)
J. Sheil, O.O. Versolato, V. Bakshi and H. Scott, Review of the 1st EUV Light Sources Code Comparison Workshop, Atoms 11, (10), 130: 1-18 (2023)
L. Poirier, Ion diagnostics for Extreme Ultraviolet Nanolithography, VU University Amsterdam, 2023-10-06

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