Publications - EUV Plasma Processes - ARCNL

L. Behnke, E.J. Salumbides, G. Göritz, Y. Mostafa, D.J. Engels, W.M.G. Ubachs and O.O. Versolato, High-energy parametric oscillator and amplifier pulsed light source at 2-μm, Opt. Express 31, (15), 24142-24156 (2023)
B. Liu, R.A. Meijer, W. Li, J. Hernandez-Rueda, H. Gelderblom and O.O. Versolato, Mass partitioning in fragmenting tin sheets, Phys. Rev. Appl. 20, (1), 014048: 1-18 (2023)
D.J. Hemminga, L. Poirier, J. Hernandez-Rueda, B. Liu, A.C. Lassise, R. Hoekstra, J. Sheil and O.O. Versolato: Tin fluid dynamics driven by laser-produced plasmas relevant to EUV nanolithography In: Proceedings of SPIE 12494 ,Optical and EUV Nanolithography XXXVI, SPIE-Intl Soc Optical Eng, 2023.
D.J. Hemminga, O.O. Versolato and J. Sheil, Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources, Phys. Plasmas 30, (3), 033301: 1-9 (2023)
S. Rai, K. Bijlsma, L. Poirier, E. de Wit, L. Assink, A.C. Lassise, I. Rabadán, L. Méndez, J. Sheil, O.O. Versolato and R. Hoekstra, Evidence of production of keV Sn⁺ ions in the H₂ buffer gas surrounding an Sn-plasma EUV source, Plasma Sources Sci. Technol. 32, (3), 035006: 1-9 (2023)
S. Rai, Ionic interactions around EUV generating tin plasma, University of Groningen, 2023-02-28
B. Liu, Morphology of liquid tin sheets formed by laser impact on droplets, VU University Amsterdam, 2022-12-13
L. Poirier, D.J. Hemminga, A.C. Lassise, L. Assink, R. Hoekstra, J. Sheil and O.O. Versolato, Strongly anisotropic ion emission in the expansion of Nd:YAG-laser-produced plasma, Phys. Plasmas 29, (12), 123102: 1-11 (2022)
B. Liu, J. Hernandez-Rueda, H. Gelderblom and O.O. Versolato, Speed of fragments ejected by an expanding liquid tin sheet, Phys. Rev. Fluids 7, (8), 083601: 1-16 (2022)
S. Rai, K. Bijlsma, I. Rabadán, L. Méndez, P.A.J. Wolff, M. Salverda, O.O. Versolato and R. Hoekstra, Charge exchange in collisions of 1–100-keV Sn3+ ions with H2 and D2, Phys. Rev. A 106, (1), 012804: 1-10 (2022)

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