Publications - ARCNL

EUV Generation & Imaging

Group leaders: Dr. Stefan Witte / Prof. dr. Kjeld Eikema

V. Verrina, S. Edward, H. Zhang, A. Antoncecchi, S. Witte and P.C.M. Planken, Role of scattering by surface roughness in the photoacoustic detection of hidden micro-structures, Appl.Opt., (2020)
V. Verrina, S. Edward, H. Zhang, S. Witte and P.C.M. Planken, Photoacoustic detection of low duty cycle gratings through optically opaque layers, Appl.Phys.Lett. 117, 5: 051104: 1-6 (2020)
S. Edward, H. Zhang, S. Witte and P.C.M. Planken, Laser-induced ultrasonics for detection of low-amplitude grating through metal layers with finite roughness, Opt. Express 28, 16: 23374-23387 (2020)
S. Edward, H. Zhang, I. Setija, V. Verrina, A. Antoncecchi, S. Witte and P.C.M. Planken, Detection of hidden gratings through multilayer nanostructures using light and sound, Phys. Rev. Appl. 14, 1: 014015-1-16 (2020)
H. Zhang, J.-P. Colombier and S. Witte, Laser-induced periodic surface structures: Arbitrary angles of incidence and polarization states, Phys.Rev.B 101, 24: 245430: 1-15 (2020)
F. Torretti, J. Sheil, R. Schupp, M.M. Basko, M. Bayraktar, R.A. Meijer, S. Witte, W.M.G. Ubachs, R. Hoekstra, O.O. Versolato, A.J. Neukirch and J. Colgan, Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography, Nature Commun. 11, 1: 2334: 1-8 (2020)
A.P. Konijnenberg, A.C.C. Beurs, G.S.M. Jansen, H.P. Urbach, S. Witte and W.M.J. Coene, Phase retrieval algorithms for lensless imaging using diffractive shearing interferometry, J. Opt. Soc. Am. A 37, 6: 914-924 (2020)
C. Messinis, V.T. Tenner, J.F. Boer, S. Witte and A. den Boef, Impact of coherence length on the field of view in dark-field holographic microscopy for semiconductor metrology: theoretical and experimental comparisons, Appl.Opt. 59, 11: 3498-3507 (2020)
L. Loetgering, M. Du, K.S.E. Eikema and S. Witte, zPIE: an autofocusing algorithm for ptychography, Opt. Lett. 45, 7: 2030-2033 (2020)
P.C. Konda, L. Loetgering, K.C. Zhou, S. Xu, A.R. Harvey and R. Horstmeyer, Fourier ptychography: current applications and future promises, Opt. Express 28, 7: 9603-9630 (2020)

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