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Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
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Publications - Ion Interactions
D.J. Hemminga, L. Poirier, J. Hernandez-Rueda, B. Liu, A.C. Lassise, R. Hoekstra, J. Sheil and O.O. Versolato:
Tin fluid dynamics driven by laser-produced plasmas relevant to EUV nanolithography
In:
Proceedings of SPIE 12494 ,Optical and EUV Nanolithography XXXVI, SPIE-Intl Soc Optical Eng, 2023.
S. Rai, K. Bijlsma, L. Poirier, E. de Wit, L. Assink, A.C. Lassise, I. Rabadán, L. Méndez, J. Sheil, O.O. Versolato and R. Hoekstra,
Evidence of production of keV Sn
+
ions in the H
2
buffer gas surrounding an Sn-plasma EUV source
, Plasma Sources Sci. Technol.
32
, (3), 035006: 1-9 (2023)
S. Rai,
Ionic interactions around EUV generating tin plasma
, University of Groningen, 2023-02-28
Y. Huo, M.K. Espinoza Cangahuala, M. Goulart, V. Zamudio-Bayer, M. Kubin, M. Timm, J.T. Lau, B. von Issendorff, R. Hoekstra, S. Faraji and T. Schlathölter,
Soft-x-ray spectroscopy of coronene+ and (coronene+H)+ cations: The influence of hydrogenation on electronic structure and photofragmentation
, Phys. Rev. A
106
, (6), 063104: 1-11 (2022)
L. Poirier, D.J. Hemminga, A.C. Lassise, L. Assink, R. Hoekstra, J. Sheil and O.O. Versolato,
Strongly anisotropic ion emission in the expansion of Nd:YAG-laser-produced plasma
, Phys. Plasmas
29
, (12), 123102: 1-11 (2022)
S. Rai, K. Bijlsma, I. Rabadán, L. Méndez, P.A.J. Wolff, M. Salverda, O.O. Versolato and R. Hoekstra,
Charge exchange in collisions of 1–100-keV Sn3+ ions with H2 and D2
, Phys. Rev. A
106
, (1), 012804: 1-10 (2022)
L. Poirier, A.C. Lassise, Y. Mostafa, L. Behnke, N. Braaksma, L. Assink, R. Hoekstra and O.O. Versolato,
Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer
, Appl. Phys. B- Lasers O
128
, (7), 135: 1-7 (2022)
L. Poirier, A. Bayerle, A.C. Lassise, F. Torretti, R. Schupp, L. Behnke, Y. Mostafa, W.M.G. Ubachs, O.O. Versolato and R. Hoekstra,
Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy- and charge-state-resolved spectrometry of tin laser-produced plasma
, Appl. Phys. B- Lasers O
128
, (3), 39: 1-11 (2022)
Z. Bouza, J. Byers, J. Scheers, R. Schupp, Y. Mostafa, L. Behnke, Z. Mazzotta, J. Sheil, W.M.G. Ubachs, R. Hoekstra, M. Bayraktar and O.O. Versolato,
The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range
, AIP Advances
11
, (12), 125003: 1-9 (2021)
D.J. Hemminga, L. Poirier, M.M. Basko, R. Hoekstra, W.M.G. Ubachs, O.O. Versolato and J. Sheil,
High-energy ions from Nd:YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model
, Plasma Sources Sci. Technol.
30
, (10), 105006: 1-10 (2021)
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Mission
Research
Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Kjeld Eikema
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
Career
Career
All vacancies
Postdoc vacancies
PhD vacancies
Scientific internships
Support vacancies
Career
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Coming from abroad
Candidate portal
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ARCNL Newsletter