Group leaders

dr. Lyuba Amitonova

Nanoscale Imaging and Metrology

Group leader

dr. Roland Bliem

Materials & Surface Science for EUVL

Group leader

Arie den Boef

Computational Imaging

Group leader

prof.dr. Kjeld Eikema

EUV Generation & Imaging

Group leader

prof.dr. Ronnie Hoekstra

Ion Interactions

Group leader

dr. Peter Kraus

High-Harmonic Generation & EUV Science

Group leader

dr. Emilia Olsson

Materials Theory and Modeling

Group leader

dr.ir. Bas Overvelde

Group leader

prof.dr. Paul Planken

Light-Matter Interaction

Group leader

dr. John Sheil

Plasma Theory and Modeling

Group leader

prof. Wim Ubachs

EUV Plasma Processes

Guest researcher

dr. Oscar Versolato

EUV Plasma Processes

Group leader

dr. Bart Weber

Contact Dynamics

Group leader

dr. Stefan Witte

EUV Generation & Imaging

Group leader