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• Diffraction-based overlay metrology from visible to infrared wavelengths using a single sensor

  February 14, 2022

  T.T.M. van Schaijk, C. Messinis, N. Pandey, A. Koolen, S. Witte, J.F. de Boer and A.J. den Boef, Diffraction-based overlay metrology from visible to infrared wavelengths using a single sensor, J. Micro/Nanopattern. Mats. Metro 21, (1), 014001: 1-10 (2022)

• Chemical Mechanisms of Metal-Based Extreme Ultraviolet Resists

  December 16, 2022

  A.M. Brouwer, Chemical Mechanisms of Metal-Based Extreme Ultraviolet Resists, J. Photopolym. Sci. Technol. 35, (1), 81-86 (2022)

• Extreme ultraviolet patterning of tin-oxo cages

  March 24, 2017

  J. Haitjema, Y. Zhang, M. Vockenhuber, D. Kazazis, Y. Ekinci and A.M. Brouwer: Extreme ultraviolet patterning of tin-oxo cages In: Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII /ed. E.M. Panning and K.A. Goldberg, SPIE-Intl Soc Optical Eng, 2017. - pp. 1014325: 1-10 (Proceedings SPIE;)

• Absorption and exposure kinetics of photoresists at EUV

  March 24, 2017

  R. Fallica, J. Haitjema, L. Wu, S. Castellanos Ortega, A.M. Brouwer and Y. Ekinci: Absorption and exposure kinetics of photoresists at EUV In: Proceedings SPIE /ed. E.M. Panning and K.A. Goldberg, SPIE-Intl Soc Optical Eng, 2017. - pp. 101430A: 1-11

• Sonia Castellanos accepts position at Inpria

  January 20, 2020

  Group leader and department head Sonia Castellanos (EUV Photoresists) has been offered a position at the American photoresist company Inpria. Castellanos has accepted the offer and will leave ARCNL by 1 March 2020, to start …

• Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy

  June 22, 2017

  Y. Zhang, J. Haitjema, X. Liu, F.O.L. Johansson, A. Lindblad, S. Castellanos Ortega, N. Ottosson and A.M. Brouwer, Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy, J. of Micro/Nanolithography. MEMS and MOEMS 16, (2), 123510: 1-7 (2017)

• Extreme ultraviolet patterning of tin-oxo cages

  September 15, 2017

  J. Haitjema, Y. Zhang, M. Vockenhuber, D. Kazazis, Y. Ekinci and A.M. Brouwer, Extreme ultraviolet patterning of tin-oxo cages, J. of Micro/Nanolithography. MEMS and MOEMS 16, (3), 033510:1-7 (2017)

• Optimizing pump–probe reflectivity measurements of ultrafast photoacoustics with modulated asynchronous optical sampling

  October 1, 2023

  M.C. Velsink, M. Illienko, P. Sudera and S. Witte, Optimizing pump–probe reflectivity measurements of ultrafast photoacoustics with modulated asynchronous optical sampling, Rev. Sci. Instrum. 94, (10), 103002: 1-10 (2023)

• Laser-induced periodic surface structures: Arbitrary angles of incidence and polarization states

  June 23, 2020

  H. Zhang, J.-P. Colombier and S. Witte, Laser-induced periodic surface structures: Arbitrary angles of incidence and polarization states, Phys. Rev. B 101, (24), 245430: 1-15 (2020)

• Slippery when wet: how does lubrication work?

  December 20, 2019

  In a recent paper in Sciences Advances, researchers from the University of Amsterdam, with a contribution of ARCNL group leader Bart Weber, present new experimental insight into how lubrication works. They have developed a new …