October 13, 2020
L. Wu, I. Bespalov, K. Witte, O.C.M. Lugier, J. Haitjema, M. Vockenhuber, Y. Ekinci, B. Watts, A.M. Brouwer and S. Castellanos Ortega, Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy, J. Mater. Chem. C 8, (42), 14757-14765 (2020)