August 5, 2024
Q. Evrard, N. Sadegh, S. Mathew, E. Zuidinga, B. Watts, M. Paradiz Dominguez, A. Giglia, N. Mahne, S. Nannarone, A. Nishimura, T. Goya, T. Sugioka, M. Vockenhuber, Y. Ekinci and A.M. Brouwer, Extreme Ultraviolet Photoresponse of Organotin-Based Photoresists with Borate Counteranions, ACS Appl. Mater. Interfaces 16, (32), 42947-42956 (2024)