Grant awarded for algorithmic nanoscale imaging collaboration
The CHAIN collaboration is one of twelve new research projects awarded funding from NWO under the Perspectief program. The CHAIN project is a collaboration between researchers from TU Delft, ARCNL, AMOLF, Leiden University and Utrecht University, who will develop new nanoscale imaging techniques to improve the computer chip manufacturing process.
Sharp view of the smallest structures
Semiconductor chips are an important part of Dutch industry. New imaging and inspection techniques are needed to make these chips smaller, more powerful, more energy efficient, and less harmful to the environment. These techniques must be capable of producing high-precision, high-resolution, and highly efficient three-dimensional images of the smallest possible structures.
CHAIN (Coherent Algorithm-based Imaging of Nanostructures) will develop new techniques based on light, extreme ultraviolet (EUV) radiation, and electron beams. By combining new measurement techniques with advanced data processing, researchers at TU Delft, ARCNL, AMOLF, Leiden University and Utrecht University will make imaging faster and more accurate. This will enable more precise control of manufacturing processes.
ARCNL’s link in the CHAIN
The CHAIN project will be led by Stefan Witte, professor at TU Delft and former ARCNL group leader. Lyuba Amitonova, leader of the Nanoscale Imaging and Metrology group at ARCNL and associate professor at Vrije Universiteit Amsterdam, will lead the ARCNL part of the project, focusing on 3D imaging with visible light.
“We will use computational algorithms, structured illumination, and lensless detection to enable faster and more accurate methods of 3D optical imaging,” explains Lyuba. As part of this project, Lyuba’s research group will also get a new PhD student and a chance to further collaborate with other Dutch leaders in the field.
One of twelve NWO Perspectief projects
The NWO Perspectief program is aimed at funding scientific research projects that have an especially societal and economic impact. You can learn more about the program and the eleven other new projects on the NWO website.
