PhD-student: In semiconductor manufacturing technology advanced metrology to inspect the quality of devices as they are manufactured is crucial. You will develop a new paradigm for metrology on the interface …
As a PhD student, you will develop the optics of nonlinear metasurfaces for wafer metrology. You will build an instrument to generate and measure nonlinear optical signals from nanostructured dielectric …
This PhD project aims at understanding and controlling tin targets for laser-produced plasma, generating extreme ultraviolet (EUV) light for state-of-the-art nanolithography. In a team effort, in close collaboration with the …
As a PhD student, you will develop new methods for spatial coherence control. You will create a new type of bright laser sources with optimized coherence functions and wavefronts. Your …
Upon loading and unloading wafers in nanolithography machines, friction occurs between the wafer and its support. While some friction is required to fixate the wafer, inhomogeneous deformations and stresses that …
As a PhD student you will develop a 3D lensless imaging system, using coherent extreme ultraviolet radiation as the light source. You will use this system to image complex lithographic …
