Materials and Surface Science for EUV Lithography

Group leader: Dr. Roland Bliem

Masters and Bachelors Projects

We regularly have opportunities for research projects in our group, matching the duration of MSc or BSc projects. For examples of internships, see the descriptions below.
If you are interested in exploring new thin-film materials and characterizing their surface properties, please contact us at

Scientific Internships

The following topical areas can serve as the basis for scientific internships on the level of a Masters thesis or comparable internships. If you are interested in more details, contact us at

Freestanding films of nanoscale thickness: Creating an ultrathin window

You will grow thin alloy films and use a heating procedure in ultra-high vacuum to make them delaminate from the surface.
The samples will be analyzed using a variety of surface science techniques: X-ray photoelectron spectroscopy, electron microscopy, scanning probe microscopy, and several more. After the delamination step in the vacuum system, you will explore the composition of the entire layer by depth-profiling with ion bombardment.

Disordered materials: Strong amorphous layers despite “100% of defects”

Thin films are ideal model systems to explore the effects of disorder on the mechanical properties of solids. You will grow thin films that are promising for the formation of metallic glasses, and study their structure and composition as a function of growth conditions and substrate material. X-ray photoelectron spectroscopy will allow for compositional analysis, while electron microscopy and atomic force microscopy will give insights into the surface topography and structure. We are currently exploring different options for accessing also X-ray diffraction facilities for additional characterization.

Jobs and Internships

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