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EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Short-Wavelength Light Sources for EUV Metrology
Angana Mondal
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
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Publications - Nanoscale Imaging and Metrology
K.M.M. Goeloe, I. Zlotnikov and L.V. Amitonova,
Wavefront Engineering and Polarization Dynamics in Biological Glass Fibers
, ACS Appl. Opt. Mater.
4
, (2), 421-428 (2026)
A. Ivanina, B. Lochocki, A. Koglbauer, S. Sokolov, S.A. Goorden and L.V. Amitonova,
Transmission matrix of a multimode fiber: In-line vs off-axis holography
, PLOS ONE
21
, (2), e0340823: 1-14 (2026)
L. de Wolf, M. Lipp, M. Cochez, A.J. den Boef and L.V. Amitonova,
Vision Transformer network for optical overlay metrology on semiconductor wafers
, APL Mach. Learn.
4
, (1), 016101: 1-10 (2026)
N. Feldman,
Optical Metasurfaces for Information Efficient Nanoscale Metrology
, University of Amsterdam, UvA, 2025-12-17
N. Feldman, A.J. den Boef, L.V. Amitonova and A.F. Koenderink,
Information advantage in sensing revealed by Fano-resonant Fourier scatterometry
, Nat. Commun.
16
, (1), 11388: 1-11 (2025)
L. de Wolf,
Vision Transformers for Accurate Overlay Metrology
, Vrije Universiteit Amsterdam, VU, 2025-07-18
A. Ivanina, M. Marshall, K. Abrashitova, T. van Leeuwen and L.V. Amitonova,
Quantitative phase imaging with a multimode fiber
, APL Photonics
10
, (4), 046116 : 1-11 (2025)
Z. Lyu,
High-resolution Imaging Through a Multimode Fiber: From Raster-scanning to Compressive Sensing
, Vrije Universiteit Amsterdam, VU, 2024-12-11
Z. Lyu, S.-T. Hung, C.S. Smith and L.V. Amitonova,
Speckle-based 3D sub-diffraction imaging of sparse samples through a multimode fiber
, APL Photonics
9
, (12), 126104: 1-10 (2024)
N. Feldman, K.M.M. Goeloe, A.J. den Boef, L.V. Amitonova and A.F. Koenderink,
Nanometer Interlaced Displacement Metrology Using Diffractive Pancharatnam-Berry and Detour Phase Metasurfaces
, ACS Photonics
11
, (12), 5229-5238 (2024)
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Mission
Research
Source department
EUV Plasma Processes
Oscar Versolato
Plasma Theory and Modeling
John Sheil
Ion Interactions
Ronnie Hoekstra
Metrology department
EUV Generation & Imaging
Stefan Witte
Light-Matter Interaction
Paul Planken
Computational Imaging
Arie den Boef
High-Harmonic Generation and EUV Science
Peter Kraus
Nanoscale Imaging and Metrology
Lyuba Amitonova
Short-Wavelength Light Sources for EUV Metrology
Angana Mondal
Materials department
Contact Dynamics
Bart Weber
Materials & Surface Science for EUVL
Roland Bliem
Materials Theory and Modeling
Emilia Olsson
Career
Career
All vacancies
Postdoc vacancies
PhD vacancies
Scientific internships
Support vacancies
Career
How to apply
Coming from abroad
Candidate portal
More
More
People
News
Events
Repository
Contact
ARCNL Newsletter