Nanostructure and Oxidation of a Thin Film Ruthenium Molybdenum Alloy

The nanostructure and surface composition of a ruthenium molybdenum thin film deposited with pulsed laser deposition have been in investigated. This surface chemistry investigation focused on the interaction with oxygen and how the surface morphology influenced this interaction. Minimal difference in the amount of oxidation between a metallic glass and a polycrystalline film was observed. However, the ruthenium molybdenum thin film metallic glass showed promising properties regarding the surface roughness and oxide diffusion barrier characteristics.