Investigating Tin Vapor Broadening and Shifting Mechanisms for Gas Parameter Extraction Using UV Shadowgraphy

Publication date
Reference L. de Reus, Investigating Tin Vapor Broadening and Shifting Mechanisms for Gas Parameter Extraction Using UV Shadowgraphy, Eindhoven University of Technology, 2025-04-09
Group EUV Plasma Processes

This thesis investigates the broadening and shifting mechanisms of neutral tin absorption lines in the
ultraviolet (UV) range and their applicability in determining key parameters for vapor targets relevant
to extreme ultraviolet (EUV) lithography and fusion research.