Analysis of the fine structure of Sn11+ – 14+ ions by optical spectroscopy in an electron beam ion trap

Publication date
DOI http://dx.doi.org/ 10.1103/PhysRevA.94.012506
Reference A. Windberger, F. Torretti, A. Borschevsky, A. Ryabtsev, S. Dobrodey, H. Bekker, E. Eliav, U. Kaldor, W.M.G. Ubachs, R. Hoekstra, J.R. Crespo López-Urrutia and O.O. Versolato, Analysis of the fine structure of Sn11+ - 14+ ions by optical spectroscopy in an electron beam ion trap, Phys. Rev. A 94, 012506: 1-11 (2016)
Group EUV Plasma Processes

We experimentally re-evaluate the fine structure of Sn11+–Sn14+ ions. These ions are essential in bright extreme-ultraviolet (EUV) plasma-light sources for next-generation nanolithography, but their complex electronic structure is an open challenge for both theory and experiment. We combine optical spectroscopy of magnetic dipole M1 transitions, in a wavelength range covering 260 to 780 nm, with charge-state selective ionization in an electron beam ion trap. Our measurements confirm the predictive power of ab initio calculations based on Fock space coupled cluster theory. We validate our line identification using semiempirical cowan calculations with adjustable wave-function parameters. Available Ritz combinations further strengthen our analysis. Comparison with previous work suggests that line identifications in the EUV need to be revisited.