The future of metrology is powered by algorithms

Yesterday, ASML published on their website a very interesting story about Arie den Boef’s research: The future of metrology is powered by algorithms. Den Boef developed YieldStar metrology and is now pioneering smart algorithms in imaging. You can read the full text here.

Den Boef is an ASML Fellow and group leader of the Computation Imaging group at ARCNL and VU.