Science and Technology of Nanolithography course at VU Summer School

Published on January 13, 2022

Students who want to know more about the surprisingly rich physics behind some of the fundamental processes occurring in nanolithography can now sign up for the VU Summer School. From July 4 – 15, 2022 the course covers topics that range from the interaction of intense laser light with metals, the generation of plasmas, the generation of EUV light in plasmas, the creation of good mirrors out of badly reflecting materials, (sub-)nm metrology on semiconductor structures and the light sources needed for such metrology.

The course is intended for advanced bachelor and master level students. Coordinating lecturers are ARCNL group leaders Oscar Versolato and Paul Planken.

Information and registration at the VU website:

You can also apply for a scholarship that will cover the tuition for the course and accommodation in one of the accommodation options (if needed).