Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography

Publication date
Reference F. Torretti, Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography, VU University Amsterdam, 2019-12-19
Group EUV Plasma Processes

This thesis aims to further the understanding of the Sn ions responsible for emis-sion of 13.5 nm radiation in laser-produced-plasma EUV sources for the nano-lithographic industry.

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