Photoreactions of Tin Oxo Cages, Model EUV Photoresists

Publication date
Reference J. Haitjema, Y. Zhang, N. Ottosson and A.M. Brouwer, Photoreactions of Tin Oxo Cages, Model EUV Photoresists, J. Photopolym. Sci. Technol. 30, (1), 99-102 (2017)

Organotin oxo cage compounds have an electronic absorption band in the UV spectral range (λmax ~220 nm) associated with a σd electronic transition. Irradiation at 225 nm of thin films of these materials leads to loss of carbon, as shown by X-ray Photoelectron Spectroscopy. Photolysis of solutions of the compounds causes a decrease and slight broadening of the absorption band, consistent with replacement of the organic groups. Quantum chemical calculations support the breaking of the tin-carbon bonds as the primary process, both in electronically excited states and in oxidized states that can be expected to be the result of EUV photoionization.