Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging

Publication date
DOI http://dx.doi.org/10.1364/OE.26.012479
Reference G.S.M. Jansen, A. de Beurs, X. Liu, K.S.E. Eikema and S. Witte, Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging, Opt. Express 26, 10: 12479-12489 (2018)
Group EUV Generation & Imaging

We demonstrate a novel imaging approach and associated reconstruction algorithm for far-field coherent diffractive imaging, based on the measurement of a pair of laterally sheared diffraction patterns. The differential phase profile retrieved from such a measurement leads to improved reconstruction accuracy, increased robustness against noise, and faster convergence compared to traditional coherent diffractive imaging methods. We measure laterally sheared diffraction patterns using Fourier-transform spectroscopy with two phase-locked pulse pairs from a high-harmonic source. Using this approach, we demonstrate spectrally resolved imaging at extreme ultraviolet wavelengths between 28 and 35 nm.