PhD defense Ruben Schupp

Published on March 29, 2021
Categories EUV Plasma Processes, Ion Interactions


On Wednesday, March 17th PhD student Ruben Schupp defended his thesis ‘Spectral characterization of solid-state laser-driven plasma sources of EUV light’ at the Vrije Universiteit in Amsterdam. Schupp performed his doctoral research in the EUV Plasma Processes group under supervision of Oscar Versolato, Ronnie Hoekstra, and Wim Ubachs. In this group, he experimentally investigated the fundamental limits of converting laser radiation via tin plasmas into EUV light, which is relevant to nanolithographic applications.