PhD defense Neha ThakurPhD student Neha Thakur successfully defensed her thesis ‘Zinc Oxoclusters for Extreme Ultraviolet Lithography’ on March 28th. Thakur did her research in the Nanophotochemistry group under supervision of promotors Fred Brouwer and Sonia Castellanos Ortega. The PhD defense took place at the University of Amsterdam (UvA).
The goal or Thakur’s research has been to get a better fundamental understanding of EUV photoresists. To do so she investigated the EUV lithography performance of Zinc based metal oxoclusters (MOCs) featuring different organic ligands. Thakur obtained pertinent mechanistic insights into the EUV-induced chemistry in the Zn-MOCs using a combination of spectroscopy techniques.