PhD: Electron-induced damage mechanisms in SEM imaging

Work Activities

The goal of the project is to learn more about the possible detrimental effects of electrons in scanning electron microscopy for metrology applications, on materials used in the semiconductor industry. As a PhD student you will use state of the art tools to unravel and quantify the physical and chemical changes at surfaces and within layers upon irradiation by electrons. You will determine the role of effects like charging, electron-stimulated reactions, and defect formation, and determine to which extent the resulting modifications can be compared with light-induced damage. 

This project is part of a larger KIC project, “Foundations for electron-beam metrology and inspection”, in which knowledge institutes Delft University of Technology and ARCNL are working together with high-tech company ASML. You will perform this project in close collaboration with a team of PhD students and postdocs working on this project at ARCNL and at Delft University of Technology, and with researchers at the Dutch semiconductor manufacturing equipment company ASML. At ARCNL you will be embedded in the Materials & Surface Science for EUVL group of dr. Roland Bliem and work closely together also with the Light/Matter Interaction group of Prof. dr. Paul Planken.


You have a university degree in physics, physical chemistry, or a related field that satisfies the Dutch university requirement to enter into a PhD program.

Good verbal and written communication skills (in English) are required.

Prior experience with surface science, ultra-high vacuum, lasers, and spectroscopy techniques is considered an advantage for the project.

Work environment

ARCNL performs fundamental research, focusing on the physics and chemistry involved in current and future key technologies in nanolithography, primarily for the semiconductor industry. While the academic setting and research style are geared towards establishing scientific excellence, the topics in ARCNL’s research program are intimately connected with the interests of the industrial partner ASML. The institute is located at Amsterdam Science Park and currently employs about 100 persons of which 65 are ambitious (young) researchers from all over the globe.

Working conditions

The position is intended as full-time (40 hours / week, 12 months / year) appointment in the service of the Netherlands Foundation of Scientific Research Institutes (NWO-I) for the duration of four years, with a starting salary of gross € 2,781 per month and a range of employment benefits. After successful completion of the PhD research a PhD degree will be granted at a Dutch University. Several courses are offered, specially developed for PhD-students. A favorable tax agreement, the ‘30% ruling’, may apply to non-Dutch applicants. ARCNL assists any new foreign PhD-student with housing and visa applications and compensates their transport costs and furnishing expenses.

More information?

For further information about the position, please contact:
dr. Roland Bliem
Group leader Materials and Surface Science for EUVL
Phone: +31 (0)20-851 7100


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Diversity code

ARCNL is highly committed to an inclusive and diverse work environment: we want to develop talent and creativity by bringing together people from different backgrounds and cultures. We recruit and select on the basis of competencies and talents. We strongly encourage anyone with the right qualifications to apply for the vacancy, regardless of age, gender, origin, sexual orientation or physical ability.

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