Event
Developments for Broadband Spectral and Spatial Characterization of Tin Plasma Light Sources for EUV Lithography
Promotors: Dr. O. Versolato, Prof. W. Ubachs, Prof. R. Hoekstra, Dr. M. Bayraktar
Date | 6 October 2023 | Time | 11:45 - 13:15 |
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Location | VU University Amsterdam | ||
Speaker | Zoi Bouza | ||
Category | PhD Ceremony |
Promotors: Dr. O. Versolato, Prof. W. Ubachs, Prof. R. Hoekstra, Dr. M. Bayraktar
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