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Developments for Broadband Spectral and Spatial Characterization of Tin Plasma Light Sources for EUV Lithography

Date 6 October 2023 Time 11:45 - 13:15
Location VU University Amsterdam
Speaker Zoi Bouza
Category PhD Ceremony

Promotors: Dr. O. Versolato, Prof. W. Ubachs, Prof. R. Hoekstra, Dr. M. Bayraktar