EUV Targets

Group leader: Prof. dr. Paul Planken

Research Activities of the Light-Matter Interaction group

The goals of the research group Light Matter Interactions are to study the interaction of femtosecond and picosecond laser pulses with various materials such as metals, for the generation and application of extremely-high-frequency ultrasound, and to improve ourĀ  understanding of light-induced damage of materials used in semiconductor device manufacturing.

Applications of ultrasound include the detection of nanostructures underneath optically opaque layers. What’s interesting is that the wavelengths that correspond to these ultrahigh sound frequencies have values in the tens to hundreds of nanometer range, which is up to an order of magnitude shorter than the typical wavelengths of visible light.

Techniques used are (two-color) pump-probe techniques, transient-grating techniques, ultrafast plasmonics, using various femtosecond laser systems, including an amplified femtosecond laser system pumping an optical parametric amplifier capable of generating mid-infrared femtosecond laser pulses.

We often fabricate nanostructures (in the cleanroom) for various research goals. For example, to illustrate the ability of extremely-high-frequency ultrasound to detect these structures, or to facilitate the excitation of surface plasmon polaritons.