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Nanophotochemistry
Group leader: Prof. dr. Fred Brouwer
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Latest Publications
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Y. Zhang, J. Haitjema, M. Baljozovic, M. Vockenhuber, D. Kazazis, T. Jung, Y. Ekinci and A.M. Brouwer,
Dual-tone Application of a Tin-Oxo Cage Photoresist Under E-beam and EUV Exposure
, J. Photopolymer. Sci.Tec.
31
, 2: 249-255 (2018)
J. Haitjema, L. Wu, A. Giuliani, L. Nahon, S. Castellanos and A.M. Brouwer,
Photo-Induced Fragmentation of a Tin-Oxo Cage Compound
, J. Photopolymer. Sci.Tec.
31
, 2: 243-247 (2018)
R. Fallica, J. Haitjema, L. Wu, S. Castellanos, A.M. Brouwer and Y. Ekinci,
Absorption coefficient of metal-containing photoresists in the extreme ultraviolet
, J. Micro/Nanolith. MEMS MOEMS
17
, 2: 023505: 1-7 (2018)
B. Weber, T. Suhina, T. Junge, L. Pastewka, A.M. Brouwer and D. Bonn,
Molecular probes reveal deviations from Amontons' law in multi-asperity frictional contacts
, Nature Commun.
9
, 888:1-7 (2018)
A. Thete, D. Geelen, S.J. van der Molen and R.M. Tromp,
Charge catastrophe and dielectric breakdown during exposure of organic thin films to low-energy electron radiation
, Phys. Rev. Lett.
119
, 26: 266803: 1-6 (2017)
J. Haitjema, Y. Zhang, M. Vockenhuber, D. Kazazis, Y. Ekinci and A.M. Brouwer,
Extreme ultraviolet patterning of tin-oxo cages
, J. Micro/Nanolith. MEMS MOEMS
16
, 3: 033510:1-7 (2017)
Y. Zhang, J. Haitjema, X. Liu, F. Johansson, A. Lindblad, S. Castellanos, N. Ottosson and A.M. Brouwer,
Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy
, J. Micro/Nanolith. MEMS MOEMS
16
, 2: 123510: 1-7 (2017)
J. Haitjema, Y. Zhang, N. Ottosson and A.M. Brouwer,
Photoreactions of Tin Oxo Cages, Model EUV Photoresists
, J. Photopolym. Sci. Tec.
30
, 1: 99-102 (2017)
Y. Zhang, J. Haitjema, X. Liu, F. Johansson, A. Lindblad, S. Castellanos, N. Ottosson and A.M. Brouwer:
Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy
In:
Advances in Patterning Materials and Processes XXXIV : conference held in San Jose, California, February 26, 2017 /ed. C.K. Hohle and R. Gronheid, SPIE., 2017. - pp. 1014606: 1-10 (Proceedings SPIE; 10146)
J. Haitjema, Y. Zhang, M. Vockenhuber, D. Kazazis, Y. Ekinci and A.M. Brouwer:
Extreme ultraviolet patterning of tin-oxo cages
In:
Extreme Ultraviolet (EUV) Lithography VIII : conference held in San Jose, California, February 26, 2017 /ed. E.M. Panning and K.A. Goldberg, SPIE., 2017. - pp. 1014325: 1-10 (Proceedings SPIE; 10143)
